Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7041433 | Flat coil and lithographic method for producing microcomponents | Felix Schmitz, Matthias Nienhaus | 2006-05-09 |
| 6277177 | Gas passage with selectively acting penetration surface and process for producing the penetration surface | Werner Grosse Bley, Thomas Böhm, Ulrich Döbler, Thomas Zetterer | 2001-08-21 |
| 5698485 | Process for producing ceramic microstructures from polymeric precursors | Martin Bruck, Tilo Vaahs, Wolfgang Bocker, Wolfgang Ehrfeld, Ludwig Giebel | 1997-12-16 |
| 5465611 | Sensor head for use in atomic force microscopy and method for its production | Alexander Ruf, Michael Abraham, Thomas Zetterer, Thomas Dietrich | 1995-11-14 |