Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7573049 | Wafer alignment method for dual beam system | Hiroyasu Kaga, Hiroyuki Suzuki | 2009-08-11 |
| 7323697 | Wafer alignment method for dual beam system | Hiroyasu Kaga, Hiroyuki Suzuki | 2008-01-29 |
| 6337486 | Electron beam drawing process and electron beam drawing apparatus | Minoru Sasaki, Yuji Tange, Kazuyoshi Oonuki, Hiroyuki Itoh | 2002-01-08 |
| 6246064 | Electron beam drawing apparatus | Minoru Sasaki, Yuji Tange, Kazuyoshi Oonuki, Hiroyuki Itoh | 2001-06-12 |
| 6127683 | Electron beam drawing apparatus | Minoru Sasaki, Yuji Tange, Kazuyoshi Oonuki, Hiroyuki Itoh | 2000-10-03 |
| 5972772 | Electron beam drawing process | Minoru Sasaki, Yuji Tange, Kazuyoshi Oonuki, Hiroyuki Itoh | 1999-10-26 |