Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5711342 | Mass flow controller, operating method and electromagnetic valve | Tomihisa Oyama, Makoto Tanaka, Makoto Ishikawa | 1998-01-27 |
| 5470045 | Solenoid-actuated diaphragm valve with biased disc spring | Tomihisa Oyama | 1995-11-28 |
| 5447173 | Mass flow controller, operating method and electromagnetic valve | Tomihisa Oyama, Makoto Tanaka, Makoto Ishikawa | 1995-09-05 |