Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8779399 | Electrostatic deflector, lithography apparatus, and method of manufacturing device | — | 2014-07-15 |
| 8772734 | Charged particle beam lithography apparatus and method, and article manufacturing method | — | 2014-07-08 |
| 5504840 | Knowledge acquisition support system and method in an expert system | Masahiro Hiji | 1996-04-02 |
| 4700317 | Automatic layout planner and a method for automatically creating a layout plan | Toshinori Watanabe, Koji Sasaki, Chizuko Yasunobu, Yumiko Iizuka, Yoshiaki Nagai +2 more | 1987-10-13 |