Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5211825 | Plasma processing apparatus and the method of the same | Katsuaki Saito, Michio Ohue, Tadasi Sonobe | 1993-05-18 |
| 5182495 | Plasma processing method and apparatus using electron cyclotron resonance | Michio Ohue, Tadasi Sonobe | 1993-01-26 |
| 5162633 | Microwave-excited plasma processing apparatus | Tadasi Sonobe, Kazuo Suzuki, Michio Ohue | 1992-11-10 |
| 5084355 | Laminar structure comprising organic material and inorganic material | Shigeru Takahashi, Toshiya Satoh, Seikichi Tanno, Michio Ohue, Naohiro Momma +1 more | 1992-01-28 |
| 4876983 | Plasma operation apparatus | Yasuhiro Mochizuki, Naohiro Momma, Shigeru Takahashi, Noboru Suzuki, Tadasi Sonobe +2 more | 1989-10-31 |