Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4667477 | Cryopump and method of operating same | Toshiharu Matsuda, Norihide Saho, Minoru Imamura | 1987-05-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4667477 | Cryopump and method of operating same | Toshiharu Matsuda, Norihide Saho, Minoru Imamura | 1987-05-26 |