Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5820320 | Apparatus for treating the inner surface of vacuum chamber | Toshiaki Kobari, Manabu Matsumoto, Mamoru Katane, Hiroaki Sakurabata, Shiro Matsuzaki | 1998-10-13 |
| 5626682 | Process and apparatus for treating inner surface treatment of chamber and vacuum chamber | Toshiaki Kobari, Manabu Matsumoto, Mamoru Katane, Hiroaki Sakurabata, Shiro Matsuzaki | 1997-05-06 |