Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7397534 | Exposure apparatus and device manufacturing method | Hideaki Sakamoto, Masaya Iwasaki, Ken Hattori, Masato Takahashi, Yutaka Endo +1 more | 2008-07-08 |
| 5877843 | Exposure apparatus | Shin Takagi | 1999-03-02 |
| 5327718 | Gas turbine apparatus and method of control thereof | Yasuhiko Otawara, Akira Shimura, Nobuyuki Iizuka, Isao Sato, Fumiyuki Hirose +5 more | 1994-07-12 |
| 5119859 | Steam governing valve | Takeshi Sato, Seiki Taketomo, Isao Fujita | 1992-06-09 |
| 4500865 | Fluid leakage detecting element | Yoshito Tanaka, Ken Ichiryu | 1985-02-19 |