| 8231851 |
Method for processing perfluorocarbon, and apparatus therefor |
Toshihiro Mori, Hisao Yokoyama, Takayuki Tomiyama, Toshihide Takano, Shin Tamata +1 more |
2012-07-31 |
| 7641867 |
Apparatus for processing perfluorocarbon |
Toshihiro Mori, Hisao Yokoyama, Takayuki Tomiyama, Toshihide Takano, Shin Tamata +1 more |
2010-01-05 |
| 7449157 |
Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method |
Shuichi Kanno, Shin Tamata, Kenji Yamamoto, Masayuki Taniguchi, Osamu Ito +1 more |
2008-11-11 |
| 7347980 |
Process for treating fluorine compound-containing gas |
Shuichi Kanno, Toshiaki Arato, Shinzo Ikeda, Ken Yasuda, Hisao Yamashita +2 more |
2008-03-25 |
| 7294315 |
Method and apparatus for disposing of fluorine-containing compound by decomposition |
Shuichi Kanno, Akio Honji, Hisao Yamashita, Shigeru Azuhata, Shin Tamata |
2007-11-13 |
| 7261868 |
Process and apparatus for the decomposition of fluorine compounds |
Shuichi Kanno, Akio Honji, Hisao Yamashita, Shigeru Azuhata, Shin Tamata |
2007-08-28 |
| 7141221 |
Apparatus for processing perfluorocarbon |
Toshihiro Mori, Hisao Yokoyama, Takayuki Tomiyama, Toshihide Takano, Shin Tamata +1 more |
2006-11-28 |
| 7128882 |
Method and apparatus for treating perfluorocompounds |
Shin Tamata, Ri Koukun, Yoshiki Shibano, Shuichi Kanno |
2006-10-31 |
| 7033550 |
Catalytic exhaust gas decomposition apparatus and exhaust gas decomposition method |
Shuichi Kanno, Shin Tamata, Kenji Yamamoto, Masayuki Taniguchi, Osamu Ito +1 more |
2006-04-25 |
| 6942841 |
Process for treating fluorine compound-containing gas |
Shuichi Kanno, Toshiaki Arato, Shinzo Ikeda, Ken Yasuda, Hisao Yamashita +2 more |
2005-09-13 |
| 6855305 |
Process for treating fluorine compound-containing gas |
Shuichi Kanno, Toshiaki Arato, Shinzo Ikeda, Ken Yasuda, Hisao Yamashita +2 more |
2005-02-15 |