Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6194680 | Microwave plasma processing method | Katsuya Watanabe, Takashi Sato | 2001-02-27 |
| 6005217 | Microwave plasma processing method for preventing the production of etch residue | Katsuya Watanabe, Takashi Sato | 1999-12-21 |
| 5925265 | Microwave plasma processing method for preventing the production of etch residue | Katsuya Watanabe, Takashi Sato | 1999-07-20 |