Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6875326 | Plasma processing apparatus with real-time particle filter | Hiroshi Inaba, Shinji Sasaki, Shinya Hirano, Kenji Furusawa, Minoru Yamasaka +1 more | 2005-04-05 |
| 6638403 | Plasma processing apparatus with real-time particle filter | Hiroshi Inaba, Shinji Sasaki, Shinya Hirano, Kenji Furusawa, Minoru Yamasaka +1 more | 2003-10-28 |