Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8499786 | Mass flow controller with enhanced operating range | Michael J. Zolock | 2013-08-06 |
| 8321060 | Method and system of on-tool and on-site MFC optimization providing consistent response | Arun Nafarajan | 2012-11-27 |
| 8251091 | Temperature insensitive mass flow controller | Michael J. Zolock | 2012-08-28 |
| 8196601 | Thermal flow sensor with zero drift compensation | — | 2012-06-12 |
| 8195312 | Multi-mode control loop with improved performance for mass flow controller | Michael Lynn Westra, Demitri Widener | 2012-06-05 |
| 8160833 | Thermal mass flow sensor with improved response across fluid types | Michael Lynn Westra, Dax Widener | 2012-04-17 |
| 8131400 | Adaptive on-tool mass flow controller tuning | — | 2012-03-06 |
| 7971604 | Flow controller delivery of a specified-quantity of a fluid | R. Michael McDonald, Brian J. Lee, Michael J. Zolock | 2011-07-05 |
| 7971480 | Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements | R. Mike McDonald, Justin Mauck | 2011-07-05 |
| 7835499 | Compact, short-pulse X-ray and T-ray fused source | David U. L. Yu | 2010-11-16 |
| 7649328 | Compact high-power pulsed terahertz source | David U. L. Yu | 2010-01-19 |
| 7640078 | Multi-mode control algorithm | — | 2009-12-29 |
| 7603186 | Adaptive response time closed loop control algorithm | — | 2009-10-13 |