Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6868354 | Method of detecting a pattern and an apparatus thereof | Masaru Nogami, Kiyoshi Iyori | 2005-03-15 |
| 6680781 | Critical dimension measurement method and apparatus capable of measurement below the resolution of an optical microscope | Takahiro Shimizu | 2004-01-20 |
| 6571196 | Size inspection/measurement method and size inspection/measurement apparatus | — | 2003-05-27 |
| 6444967 | Microscope in-focus state detecting method and apparatus using image contrast detection | Takahiro Shimizu | 2002-09-03 |