Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8712730 | Control system of substrate processing apparatus, collecting unit, substrate processing apparatus and control method of the substrate processing apparatus | Shinichiro Mori | 2014-04-29 |
| 8359117 | Substrate processing system | Shinichiro Mori | 2013-01-22 |