Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715657 | Substrate misalignment detection method, substrate position abnormality determination method, substrate transfer control method, and substrate misalignment detection device | Shinjiro Watanabe | 2023-08-01 |
| 7710455 | Node management system and node managing program using sensing system | Toshiyuki Aritsuka, Yuichi Onami, Sumie Nakabayashi, Naoki Hashiguchi | 2010-05-04 |