Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690011 | Power generation system, management device, and semiconductor manufacturing apparatus | Naotoshi Yamamine | 2020-06-23 |
| 9117862 | Substrate processing apparatus, processing tube, substrate holder, fixing part of the substrate holder, substrate processing method, and substrate manufacturing method | Masayuki Suzuki | 2015-08-25 |
| 8064233 | Power supply regulating apparatus, semiconductor manufacturing apparatus, method for controlling power to heater, and method for manufacturing semiconductor device | Masayuki Suzuki | 2011-11-22 |
| 7002113 | Heater inspection apparatus and semiconductor manufacturing apparatus having heater inspection apparatus mounted thereon | Masayuki Suzuki | 2006-02-21 |