Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7531816 | Vacuum conveying apparatus and charged particle beam equipment with the same | Hiroyuki Saito | 2009-05-12 |
| 7009192 | Charged particle beam application apparatus | Hiroyuki Suzuki | 2006-03-07 |