Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799138 | In-situ method to reduce particle contamination in a vacuum plasma processing tool | Yunxiao Gao, Yinshi Liu, Ning Shi | 2010-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7799138 | In-situ method to reduce particle contamination in a vacuum plasma processing tool | Yunxiao Gao, Yinshi Liu, Ning Shi | 2010-09-21 |