Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030035 | Prevention of electrostatic wafer sticking in plasma deposition/etch tools | Donald G. Allen, Richard J. Contreras, Michael Feldbaum | 2006-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030035 | Prevention of electrostatic wafer sticking in plasma deposition/etch tools | Donald G. Allen, Richard J. Contreras, Michael Feldbaum | 2006-04-18 |