Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821906 | Method and apparatus for treating surface of substrate plate | Kenya Wada, Kazuto Kinoshita | 2004-11-23 |
| 6631726 | Apparatus and method for processing a substrate | Kazuto Kinoshita, Kenya Wada | 2003-10-14 |
| 6421932 | Method and apparatus for drying substrate plates | Kazuto Kinoshita, Isamu Akiba, Masao Sugiyama | 2002-07-23 |
| 6418640 | Drying apparatus for a substrate and drying method thereof | Hiroshi Fukuda, Yoshitomo Yasuike, Kunio Aburada | 2002-07-16 |
| 5092011 | Disk washing apparatus | Hisayoshi Ichikawa, Takahisa Ishida | 1992-03-03 |