Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12243758 | Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein | Shota Kaneko, Norihide Sagara | 2025-03-04 |
| 11945446 | Control device | Sadato Horiuchi | 2024-04-02 |
| 10408155 | Onboard control device | Shinsaku Tsukada, Yoshihiko Akagi, Sadato Horiuchi | 2019-09-10 |
| 10174700 | Onboard control device | Shinsaku Tsukada, Yoshihiko Akagi, Sadato Horiuchi | 2019-01-08 |
| 9799540 | Liquid processing apparatus, liquid processing method and storage medium | — | 2017-10-24 |