Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8643927 | MEMS device and method of manufacturing MEMS device | Chisaki Takubo | 2014-02-04 |
| 8616058 | Angular velocity detecting device | Yasushi Goto | 2013-12-31 |
| 8429969 | Inertial sensor and method of manufacturing the same | Kiyoko Yamanaka, Takashi Hattori, Yasushi Goto | 2013-04-30 |
| 8427177 | Capacitance sensor | Kiyoko Yamanaka, Yasushi Goto, Toshiaki Nakamura, Masahide Hayashi | 2013-04-23 |
| 8327706 | Angular velocity detecting device | Yasushi Goto | 2012-12-11 |
| 8250916 | Inertial sensor | Hiroshi Fukuda | 2012-08-28 |
| 8096180 | Inertial sensor | Kiyoko Yamanaka | 2012-01-17 |
| 7972886 | Method of manufacturing micro electro mechanical systems device | Yasushi Goto, Yuko Hanaoka, Tsukasa Fujimori | 2011-07-05 |
| 7919814 | Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode | Yasushi Goto, Tsukasa Fujimori, Kiyoko Yamanaka | 2011-04-05 |
| 7770451 | Angular velocity detecting device | Yasushi Goto | 2010-08-10 |
| 7513155 | Inertial sensor | Hiroshi Fukuda | 2009-04-07 |