Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8100413 | Workpiece vacuum chuck head | Takenori Hirakawa | 2012-01-24 |
| 7745972 | Precise positioning apparatus | — | 2010-06-29 |
| 7242204 | Substrate aligning system | Seiji Matsuda | 2007-07-10 |
| 7021882 | Drive-section-isolated FOUP opener | — | 2006-04-04 |
| 6824344 | Drive-section-isolated FOUP opener | — | 2004-11-30 |
| 6702099 | Work conveying system | Kazuyuki Matsumura, Takafumi Iseri | 2004-03-09 |
| 6470927 | Foup opener | — | 2002-10-29 |