Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5108512 | Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets | Mark Richardson, Eugene F. Bielby | 1992-04-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5108512 | Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets | Mark Richardson, Eugene F. Bielby | 1992-04-28 |