Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9176391 | Method and arrangement for displacement | Michael Fangerau, Alexander Mangold | 2015-11-03 |
| 9052608 | Method and device for imaging a radiation-sensitive substrate | Roelof Wijnaendts Van Resandt | 2015-06-09 |
| 8390790 | Method and apparatus for reproducing a programmable mask on a substrate | Alexander Mangold, Udo Becker, Steffen Diez | 2013-03-05 |
| 7487069 | Method for generating a control output for a position control loop | Sven Vogler, Robert Weikert, Roelof Wijnaendts-Van-Resandt | 2009-02-03 |
| 6639179 | Apparatus for producing microbore holes | Sven Vogler | 2003-10-28 |