Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10758945 | Liquid knife, liquid knife cleaning apparatus and liquid knife assembly apparatus | Liang-Gei Yao, Lin-Jie Huang, Wei Zhou, Yu Yang, Erlun Chen +3 more | 2020-09-01 |
| 10478849 | Nozzle auto-cleaning device and nozzle auto-cleaning method | Chen Yuan, Wei Zhou, Cheng-Nan Hsieh, Yu Yang, Liang-Gei Yao +1 more | 2019-11-19 |
| 10049906 | Substrate processing apparatus | Weigang Peng, Wei Zhou, Chengnan Hsieh, Yu Yang, Chen Yuan | 2018-08-14 |