Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10112218 | Chamber cleaning apparatus and control method thereof | Jin Ke Hu, Changkai Jie | 2018-10-30 |
| 9910356 | Method of patterning thin films | Lei Zhang, Zhuyi Luo, Jinho YOUN, Jianqiang Guo, HONGLIN LIAO | 2018-03-06 |
| 9841690 | Method and apparatus for exposure pattern correction and exposure system | Yifeng Li, Hequn Zhang, Hongwei Xing | 2017-12-12 |