Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10254131 | Detection device, substrate holder and method for detecting position of substrate on substrate holder | Guodong Li, Zhen Wei, Shibo Guo, Weiwei Sun, Chenchen Jiang | 2019-04-09 |