Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10407768 | Clamp and carrier used in a coating apparatus | — | 2019-09-10 |
| 9719723 | Substrate support structure, vacuum drying apparatus and method for vacuum drying a substrate | Hongwei Xing, Min Yuan, Hequn Zhang, Longgen Yang | 2017-08-01 |