Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5870007 | Multi-dimensional physical actuation of microstructures | William N. Carr | 1999-02-09 |
| 5796152 | Cantilevered microstructure | William N. Carr | 1998-08-18 |
| 5781331 | Optical microshutter array | William N. Carr | 1998-07-14 |
| 5510299 | Method for the manufacture of IC-processed micro electro-static motors | Zhi-Jian Li, Li Liu | 1996-04-23 |