Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5573679 | Fabrication of a surface micromachined capacitive microphone using a dry-etch process | Alan W. Mitchell, Yuebin Ning | 1996-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5573679 | Fabrication of a surface micromachined capacitive microphone using a dry-etch process | Alan W. Mitchell, Yuebin Ning | 1996-11-12 |