Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386267 | Learning control system and method for ultra-precision lithographic apparatus based on uncertainty compensation | Pengyu Sun, Aichen Wu, Yang Liu, Jiubin Tan | 2025-08-12 |
| 12124228 | Learning control system and method for nano-precision motion stage | Kaixin LIU, Shuaiqi Chen, Yang Liu, Jiubin Tan | 2024-10-22 |