Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793785 | Magnetic control oscillating-scanning sputter | Cheng-Chung Lee | 2004-09-21 |
| 6723210 | Method for improving performance of sputtering target | Yung-Fu Chen | 2004-04-20 |
| 6465369 | Method for stabilizing semiconductor degas temperature | Ta-Te Chen, Chih-hung Shu, Chan-bin Ho | 2002-10-15 |
| 6387231 | Moving heaters disposed in a susceptor device in a masked sputtering chamber | Ching-Chao Wang | 2002-05-14 |