Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12251785 | Chemical mechanical planarization equipment, wafer transfer method, and wafer planarization unit | Jingran Gu | 2025-03-18 |
| 12194592 | Polishing and loading/unloading component module | Linghan Shen | 2025-01-14 |
| 11908720 | CMP wafer cleaning equipment, wafer transfer robot and wafer flipping method | Linghan Shen | 2024-02-20 |