Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101047 | Gas purifier for wafer substrate accommodating unit | Ming-Mo Lo, Cheng-Hsin Chen | 2018-10-16 |
| 9817306 | Extreme ultraviolet (EUV) pod having marks | Wei-Yen Chen, Cheng-Ju Lee, LONG-MING LU, Cheng-Hsin Chen | 2017-11-14 |
| 9786535 | Wafer transport system and method for operating the same | Hui-Ming Pao, Cheng-Hsin Chen, PO-TING LEE, Ming-Chien Chiu | 2017-10-10 |
| 9230839 | Reticle pod having gas guiding apparatus | Pao-Yi Lu | 2016-01-05 |