Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11787621 | Reticle pod and wear parts thereof | Ming-Chien Chiu | 2023-10-17 |
| 9097980 | Transmission box for reticle POD | Chen-Wei Ku, Pao-Yi Lu, Kun-Hong Liao | 2015-08-04 |
| 8794444 | Large-sized front opening unified wafer POD | Tzu-Jeng Hsu, Shao-Wei Lu, Ming-Long Chiu | 2014-08-05 |
| 8387799 | Wafer container with purgeable supporting module | Ming-Long Chiu, Kuo-Chun Hung, Chen-Wei Ku, Yi-Liang Hou | 2013-03-05 |
| 8220630 | EUV pod with fastening structure | Chen-Wei Ku, Pao-Yi Lu, Chin-Ming Lin | 2012-07-17 |