Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7598500 | Ion source and metals used in making components thereof and method of making same | Nestor P. Murphy, David Rock, Maximo Frati | 2009-10-06 |
| 7405411 | Ion source with multi-piece outer cathode | — | 2008-07-29 |
| 7198699 | Sputter coating apparatus including ion beam source(s), and corresponding method | Scott V. Thomsen | 2007-04-03 |