Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383571 | Device and method for coating a flat substrate | — | 2002-05-07 |
| 5650196 | Device for coating substrates in semiconductor production | Karl Appich, Martin Kallis | 1997-07-22 |