Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12311497 | Method for chemical mechanical polishing of a SiC wafer based on a magnetorheological elastic metal contact corrosion polishing pad | Jiabin LU, Da Hu, Zengquan Hu, Wenrui Liang, Zirong Huang | 2025-05-27 |
| 12083647 | Magnetorheological-elastomer polishing pad for chemical mechanical polishing of semiconductor wafer, preparation method and application thereof | Jiabin LU, Da Hu, Yuhang Jin, Qiang Xiong | 2024-09-10 |