Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12399081 | Smart seals for monitoring and analysis of seal properties useful in semiconductor valves | Mookkan Periyasamy, Elizabeth Sassano, Otto J. Gregory, Godi Fischer, Tao Wei +2 more | 2025-08-26 |
| 11860059 | Smart seals for monitoring and analysis of seal properties useful in semiconductor valves | Mookkan Periyasamy, Elizabeth Sassano, Otto J. Gregory, Godi Fischer, Tao Wei +2 more | 2024-01-02 |