Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5728491 | Phase shift mask and method of manufacture | — | 1998-03-17 |
| 5300377 | Method of manufacturing a phase shift mask comprising two phase shift layers and sloping sidewalls | — | 1994-04-05 |
| 5245470 | Polarizing exposure apparatus using a polarizer and method for fabrication of a polarizing mask by using a polarizing exposure apparatus | — | 1993-09-14 |