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Chung-Sheng Chang

GC Globalwafers Co.: 1 patents #142 of 221Top 65%
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Patent #TitleCo-InventorsDate
12006589 Purification apparatus and method of purifying hot zone parts Masami Nakanishi, Yu-Sheng Su, Yen-Hsun Chu, Yung-Chi Wu, Yi-Hua Fan 2024-06-11