TS

Thorsten Schepers

Globalfoundries: 1 patents #2,221 of 4,424Top 55%
📍 Dresden, DE: #1,650 of 3,254 inventorsTop 55%
Overall (All Time): #3,172,782 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8518720 UV irradiance monitoring in semiconductor processing using a temperature dependent signal Ulrich Mayer 2013-08-27