Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9978622 | Moisture and/or electrically conductive remains detection for wafers after rinse / dry process | Lutz Claussen | 2018-05-22 |
| 9396977 | Moisture and/or electrically conductive remains detection for wafers after rinse / dry process | Lutz Claussen | 2016-07-19 |