Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9367882 | Waferstart processes and systems for integrated circuit fabrication | Tony Genenncher, Stephan Puelm, Michael Foerster | 2016-06-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9367882 | Waferstart processes and systems for integrated circuit fabrication | Tony Genenncher, Stephan Puelm, Michael Foerster | 2016-06-14 |