TT

Tomoyoshi TOIDA

GI Gigaphoton: 1 patents #146 of 212Top 70%
Overall (All Time): #2,749,411 of 4,157,543Top 70%
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Patent #TitleCo-InventorsDate
11119421 Extreme ultraviolet light condensation mirror, extreme ultraviolet light generation apparatus, and electronic device manufacturing method — 2021-09-14