Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10203272 | MEMS aerosol impactor | James C. Wilson | 2019-02-12 |
| 7098757 | Electrically-coupled micro-electro-mechanical filter systems and methods | Farrokh Avazi | 2006-08-29 |
| 7056757 | Methods of forming oxide masks with submicron openings and microstructures formed thereby | Farrokh Ayazi, Reza Abdolvand | 2006-06-06 |
| 7023065 | Capacitive resonators and methods of fabrication | Farrokh Ayazi | 2006-04-04 |