Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7431796 | Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment | Kevin P. Martin, Dmitri A. Choutov | 2008-10-07 |
| 6852195 | Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment | Kevin P. Martin, Dmitri A. Choutov | 2005-02-08 |
| 6656568 | Ordered arrays of nanoclusters | Thomas Andrew Winningham, Kenneth Douglas | 2003-12-02 |
| 6258287 | Method and apparatus for low energy electron enhanced etching of substrates in an AC or DC plasma environment | Kevin P. Martin, Dmitri A. Choutov | 2001-07-10 |
| 6033587 | Method and apparatus for low energy electron enhanced etching and cleaning of substrates in the positive column of a plasma | Kevin P. Martin, Dmitri A. Choutov | 2000-03-07 |
| 6027663 | Method and apparatus for low energy electron enhanced etching of substrates | Kevin P. Martin, Dmitri A. Choutov | 2000-02-22 |
| 5917285 | Apparatus and method for reducing operating voltage in gas discharge devices | Dmitri A. Choutov, Kevin P. Martin | 1999-06-29 |
| 5882538 | Method and apparatus for low energy electron enhanced etching of substrates | Kevin P. Martin, Dmitri A. Choutov | 1999-03-16 |
| 4734158 | Molecular beam etching system and method | — | 1988-03-29 |