Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11312621 | Sensing thermal gradients within a microelectromechanical device | — | 2022-04-26 |
| 10018530 | System for measuring transmission of light through glasses | Prashant Santan, Newton M. Tarleton | 2018-07-10 |
| 8513864 | Micromechanical resonator with enlarged portion | — | 2013-08-20 |
| 7924119 | Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports | Farrokh Ayazi, Reza Abdolvand | 2011-04-12 |
| 7859365 | Low frequency process-variation-insensitive temperature-stable micromechanical resonators | Farrokh Ayazi | 2010-12-28 |
| 7843284 | Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators | Farrokh Ayazi, Reza Abdolvand | 2010-11-30 |
| 7639105 | Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators | Farrokh Ayazi, Reza Abdolvand | 2009-12-29 |
| 7564162 | Process compensated micromechanical resonators | Farrokh Ayazi | 2009-07-21 |
| 7511870 | Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto | Farrokh Ayazi, Siavash Pourkamali, Krishnakumar Sundaresan | 2009-03-31 |
| 7176770 | Capacitive vertical silicon bulk acoustic resonator | Farrokh Ayazi, Siavash Pourkamali | 2007-02-13 |
| 6909221 | Piezoelectric on semiconductor-on-insulator microelectromechanical resonators | Farrokh Ayazi, Gianluca Piazza, Reza Abdolvand, Shweta Humad | 2005-06-21 |