Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5352656 | Method for the chemical vapor deposition of group IB and group VIIIB metal barrier layers | Walter J. Lackey, John A. Hanigofsky, David N. Hill, Michael J. Shapiro, William B. Carter | 1994-10-04 |
| 5108983 | Method for the rapid deposition with low vapor pressure reactants by chemical vapor deposition | Walter J. Lackey, William B. Carter, John A. Hanigofsky, David N. Hill | 1992-04-28 |